Residual Gas Analysis (Instruments and Services)

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Residual Gas Analysis        Residual Gas Analysis

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HORIBA residual gas analyzer HORIBA, Ltd.
- 2, Miyanohigashi-cho, Kisshoin, Minami-ku, Kyoto, 601-8510, Japan

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products:   Micropole Residual Gas Analyzer

Micropole™ is a miniature array of quadrupole mass spectrometers which has 9 detection parts using 16 original column electrodes. This allow for easy integration into small spaces whilst still getting state of the art resolution.
In addition, the ability to operate at higher pressures without using a differential pump, makes this suitable for gas monitoring, both during process and after chamber cleaning.




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