UHV Manipulators and translation stages

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Pfeiffer Vacuum Pfeiffer Vacuum Inc. - www.pfeiffer-vacuum.com
- 24 Trafalgar Square, Nashua NH 03063-1988, USA

email: info@pfeiffer-vacuum.de, Tel. +1 (800) 248-8254

Pfeiffer Vacuum is a vacuum technology world leader for more than 120 years: an important milestone was the invention of the turbopump in our company more than 50 years ago. Our comprehensive range of solutions, products and services includes vacuum pumps, measurement and analysis equipment, up to complex vacuum systems.
products:   Manipulators and mechanical feedthroughs

Standard Manipulators:   Z-Axis Manipulators,   XY-Axis Manipulators,   XYZ-Axis Manipulators,   Rotary-Manipulators,   Port Aligners for Angular and Linear Adjustment,   Bellows-sealed Rotary Feedthroughs,   Elastomer-sealed Rotary Feedthroughs,   Rotary Magnetic Feedthroughs,   Elastomer-sealed Rotary/Linear Feedthroughs,   Magnetically guided Rotary/Linear Feedthrough,   Bellows-sealed Linear Feedthroughs,  

Customized Manipulators:   Numerous science research processes and industrial manufacturing processes would not be possible without a vacuum environment. Most of these processes require that the position of samples or workpieces may be altered within a vacuum chamber - In addition to multiple standard manipulators and mechanical feedthroughs Pfeiffer Vacuum offers custom versions in accordance with your wishes.
Whether Manipulators or mechanical feedthroughs with elastomer seal, diaphragm bellows or magnetic coupling - we will find solutions for your very specific requirements.







Aerotech Aerotech, Inc. - www.aerotech.com
- 101 Zeta Drive, Pittsburgh, PA 15238-2897, USA

email, Tel.

Since its inception, Aerotech has designed and manufactured the highest-performance motion control and positioning systems available, and our vacuum-compatible platforms are no exception. Aerotech's precision motion control products provide the critical performance for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication, and military/aerospace.
products:   motion control products

A wide variety of standard Aerotech motion products are available in vacuum-prepared versions.
In addition to standard platforms, Aerotech routinely manufactures custom systems designed to meet application specific needs.
All Aerotech’s vacuum compatible motion platforms minimize pump downtime, chamber contamination, and thermal issues. In addition, these systems can incorporate key application considerations like reduction of magnetic fields.
Vacuum options available:
- Low Vacuum Option (10-3 torr)
- Standard Vacuum Option (10-6 torr)
- High Vacuum Option (10-8 torr)


ALIO Industries ALIO Industries - www.alioindustries.com
- 11919 W. I70 Frontage Rd N. # 119, Wheat Ridge, CO 80033, USA

email, Tel.

ALIO Industries has quickly become the leader for motion systems in Synchrotrons through out the world. Current motion needs for UHV with non-outgassing materials and ultra-precision single nanometer repeatability with absolutely no motion jitter on point is ALIO’s product focus for the many years with proven installed systems in Synchrotrons.
products:   Nano-precision Motion Control

Hexapods:
Patented Nano- Precision Hexapods that revolutionize 6 axis precision applications.
Air Bearing Stages:
Inovative and novel(patent pending) nano-precision air bearing systems.
Linear Stages:
Precsion structures and component for unsurpased linear precision.
Rotary Stages:
Precison and hig stifness rotary stages with 0.02 arc sec resolution as a standard.
Vacuum Stages:
ALIO world leading nano-precision stages with leading ougassing number even at -10 Torr.
Custom Stages:
Custom design of our precison motion systems for OEM and manufacturers.


Huntington Motion Positioning Huntington Mechanical Laboratories, Inc. - www.huntvac.com
- 1040 La Avenida Street, Mountain View, CA 94043-1483, USA

email, Tel.

Huntington Mechanical Laboratories, Inc. (Huntington), was founded in 1969 and soon earned recognition as a leader in the design and manufacture of ultra-high vacuum (UHV) research equipment. Huntington has been supplying quality products to the highly discriminating semiconductor industry and national research laboratories for over a quarter of a century.
Huntington offers a large selection of vacuum flanges, fittings, positioners, and valves.
products:   Motion & Positioning

Stepper Motor System
Motorized Positioners
Rotary Positioners
Linear-Rotary Positioners
Linear Positioners
Hollow Tube Positioners
Precision X-Y-Z Manipulators
Stages & Platforms
Angular Motion / Wobble-Sticks


INTELLIDRIVES INTELLIDRIVES - www.intellidrives.com
- 8510 Bustleton Ave, PA 19152 Philadelphia, USA

Greg Kane, email: admin@intellidrives.com, Tel. +1-215-728-6804
products:   LINEAR ACTUATORS, ROTARY TABLES, ROTARY ACTUATORS, XY TABLES

Linear Actuators
Linear Actuators - Moving shaft
Lift stages
Linear-XY-Rotary Combination
Rotary Tables
XYZ Systems
Amplifiers and Controllers
Encoders


MadMotor UHV motor Mad City Labs Inc. - www.madcitylabs.com
- 2524 Todd Drive, Madison, WI 53713, USA

email, Tel. +1 (608) 298-0855

Mad City Labs, Inc is a leading manufacturer of flexure based nanopositioning systems capable of sub-nanometer positioning resolution. Our product line covers the entire spectrum of nanopositioning capabilities while maintaining a leadership role in multi-axis stages for high speed optical microscopy imaging.
products:   MadMotor-UHV precision piezo motor

The MadMotor™-UHV is a precision, piezo motor driven, micropositioning system for high precision alignment over long travel ranges. The MadMotor™-UHV stages use our proprietary MadMotor™ piezo motor technology allowing travel up to 10mm per axis with high resolution and excellent repeatability. Optional eddy current sensors provide 500nm sensitivity over the entire travel range.

Leveraging Mad City Labs extensive experience in engineering and manufacturing ultra-high vacuum (UHV) instrumentation, the MadMotor™-UHV is vacuum compatible to 1 x 10-11 mbar. Our experienced engineering staff have carefully designed the MadMotor™-UHV stages to account for the rigorous requirements for UHV operation. Mad City Labs' practical experience with UHV instrumentation informs our choice of materials, with only the best materials that meet our practical and technical criteria making the grade. The MadMotor™-UHV stages have been designed to withstand the rigors of sample transfer that can often damage more delicate piezo motor designs. In addition, our MadMotor™-UHV stages are able to withstand extensive periods of baking with temperatures up to 150°C. As a result, the MadMotor™-UHV is a robust and reliable stage as required by UHV applications.

The MadMotor™-UHV includes the Mad-Drive™ which is a 1, 2, or 3 axis piezo motor driver with an integrated DSP and USB interface. The Mad-Drive™ can be programmed to perform complex motion functions via the MadMotor™ DLL interface (supplied). Unlike other piezo motors the MadMotor™ DLL allows the user to treat the MadMotor™-UHV as a simple stepper motor with variable step size and stepping distance. The Mad-Drive™ controller is LabVIEW compatible and the system is provided with LabVIEW motion control examples. Optional wireless joystick control is also available. The MadMotor™-UHVstages are designed for flange mount or freestanding configurations and are compatible with a variety of Mad City Labs vacuum nanopositioning systems. The MadMotor™-UHV can be customized for your application. Contact our engineering staff for more information.


MICRONIX USA Micronix USA, LLC - www.micronixusa.com
- 15375 Barranca Parkway, Suite E-106, Irvine, CA 92618

email, Tel.

MICRONIX USA was founded in 2006 and operated as MICOS USA until 2012 with a dual purpose:
value added distributor of miCos GmbH products and design and manufacturing center for the US market.
In June 2012, we exited distribution of miCos GmbH products to focus on the US-based development and world-wide marketing of our precision motion solutions.
Products: micro- and nano-positioning components

MICRONIX USA specializes in miniature micro- and nano-positioning components for the biomedical and research markets.
In addition to our extensive standard product line, we provide rapid product development services ranging from customization of existing products to complete customized solutions.
Our products are configurable for especially demanding application environments such as
- Vacuum compatibility down to 10-9 mbar
- Crygenic environments down to 4 Kelvin
- Radiation tolerant requirements
- Non-magnetic requirements


Newmark Systems motion control systems Newmark Systems Inc. - www.newmarksystems.com
- 30191 Avenida De Las Banderas, Unit #C - Rancho Santa Margarita, CA 92688

email, Tel.

Since 1995, Newmark Systems has consistently provided positioning equipment, motion control and optical solutions to a growing number of an elite group of industry leaders that includes names such as Hughes, Raytheon, Boeing, Textron, Intel, Lucent and Delphi.
Products: motion control systems

Our design team has knowledge across multiple technologies including optics, opto-mechanics, precision positioning and motion control.
Our products include: linear tables, translation stages, rotary tables, xy tables, linear slides and other motion control systems.


NEWPORT Positioning NEWPORT CORPORATION - www.newport.com
- 1791 Deere Avenue, CA 92606 Irvine, USA

email, Tel.

Newport Corporation (NASDAQ: NEWP) is a globally recognized leader in advanced technology products and solutions for fields such as Research, Life & Health Science, Aerospace & Defense, Industrial Manufacturing, Semiconductors, and Microelectronics. Our nearly 40 years of industry knowledge and expertise crosses a broad range of technologies, allowing us to continually deliver innovative products and solutions in a myriad of areas such as: Lasers and Light Sources, Opto-mechanical Components and Mounts, Optical Filters and Gratings, Spectroscopic and Photonic Instruments, Vibration Control, Motion Systems, Robotics and Automation, Advanced Packaging and Customized Systems.
Products:

Manual Positioning: Manual linear and rotation stages, screw-drive actuators, and fiber optic positioners

Motorized Positioning: Motorized linear and rotation stages, motorized actuators, controllers and drivers and motion systems.
Vacuum and Clean Room Prepared Components:
Vacuum prepared to 1x10-6 Torr, Clean room prepared to Class 10,000
Preparation available for most standard parts, Provided for both Research or OEM volumes


NUTEC Nutec Components - www.nutec1.com
- 81 East Jefryn Boulevard, Deer Park, NY 11729-5733, United States

email, Tel.
products:   positioning products:

Our vacuum rated positioning products are is designed as fine precision machines with special attention paid to selecting high-performance components to achieve outstanding positioning performance with zero off gassing These stages are fabricated assembled and tested under strict anti-contamination protocols and use specially selected lubricants and cabling for exceptional results in terms of accuracy and motion trajectory, even with high payload.


OES Actuators and Stages OES INC - www.motioncontrolplanet.com
- 6901 Woodley Avenue, CA 91406 Van Nuys, USA

email, Tel.

Optimal Engineering Systems, Inc. (OES) is a manufacturer of motion control products. The company\'s product line includes motion control systems, drive electronics, modules and controller cards. OES also supplies high-torque rotary stepper motors, voice coil motors, servo motors, three phase brushless motor and positioning stages and slides. All products are available for immediate worldwide shipment.
Established in 1985, Optimal Engineering Systems, Inc. is headquartered in Los Angeles, California, USA. The proximity of Optimal Engineering Systems, Inc. to both the major airport and seaport facilities of Southern California makes service to international customers very expedient without any freight forwarding or time consuming difficulties.
products:   Actuators and Stages:

Linear Stages, Linear Actuators, XY Stages, XYZ Stages, Rotary Stage, Rotary Actuator
Motion Controllers, Motors, Solenoid Control Electronics, Power Supplies


OptoSigma OptoSigma - www.optosigma.com
- 2001 Deere Avenue, Santa Ana, CA 92705, USA

email, Tel.

Products:

Manual Positioners:
Steel Linear Stages - Extended Contact Bearings, Stainless Steel Linear Stages, Aluminum Crossed-roller Stages, Aluminum Ball Bearing Stages, Rotation Stages, Goniometers, Rack and Pinion Dovetail Stages, Preset Dovetail Stages, Leadscrew Stages, Tilt Platforms, OEM Slides, Accessories
Motorized Positioners:
Linear Stages, Motorized Rotation Stages, ZF Stages, Motorized Optics Holders, Magnascale Stages, Controllers, Drivers, Cables & Accessories, Piezo Stages, Compact Stepping Motors Actuators, Mini Translation Stages


PI miCos PI (PHYSIK INSTRUMENTE) L.P. - www.pi-usa.us
- 16 Albert St., Auburn, MA 01501, USA

Steve Vondran, email, Tel. +1 508-832-3456
products:   High-Vacuum Positioning Systems

PI miCos vacuum positioning products range from piezo motor drives and motorized translation stages to 6-axis parallel-kinematic positioning systems (SpaceFAB and Hexapod).
Vacuum levels to 10-9 mbar can be reached, with carefully selected materials for motors, limit switches, bearings and housings and special coatings that render lubricants unnecessary. RGA scans with the company's mass spectrometer are available to verify the vacuum compatibility of its products.


Princeton Research Instruments, Inc. - www.prileeduhv.com
- 42 Cherry Valley Road, Princeton, NJ 08542 USA

email, Tel. +1 (609) 924-0570

We manufacture scientific instruments for use in ultra-high vacuum (UHV), including reverse view Low Energy Electron Diffraction (LEED) systems, 10 kV High Energy Electron Diffraction (HEED) systems, and in-vacuum motion systems (stepper motors, positioning stages, and a motor controller).
products:   In-Vacuum Motion Systems

Princeton Research Instruments, Inc. offers miniature in-vacuum stepper motors, motorized stages, and accessories that provide rotary or translation motion in high and ultra high vacuum without the use of mechanical feedthroughs. These products provide a unique, efficient alternative to the traditional mechanical feedthroughs. A full line of accessories is available including couplings, clamps, cables, electrical feedthroughs, etc.


Transfer Engineering and Manufacturing Transfer Engineering and Manufacturing, Inc. - www.transferengineering.com
- 47697 Westinghouse Drive, Suite 100, Fremont, CA 94539, USA

email, Tel.
products:   sample introduction, transfer and positioning systems

Specializing in design and production of sample introduction, transfer and positioning systems in vacuum for OEMs, Production Facilities, R&D and University Labs
TEAM's core expertise is in the handling, transporting, positioning, and manipulation of samples, semiconductor wafers, substrates, flat panels, and other materials with precision and reliability in UHV, HV, ultra-clean, ultra-dry, and other challenging controlled environments. The product line includes MESC Compatible wafer transport systems.
Our unique, patented Precision Magnetic Manipulator (PMM) technology, with independent dual shafts for complex motions, is the core of our extensive product line. Since 1988, we have been supplying our industrial, OEM, scientific and government laboratory customers with substrate introduction and transfer systems that operate reliably, accurately and with repeatability.




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