Seals and Gaskets Keywords www.vacuum-guide.com
flanges vented screws
vacuum components 		Asia pacific   CHINA


Beijing Super Q Technology Co.,Ltd. - www.bjsuperq.com
- Room 115, Building 2, Xiyuan, No. 12, Jiancaicheng Middle Road, Xisanqi, Haidian District, Beijing 100085, China

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products: Flanges and valves

CF flange seal is made of metal gasket, not easy to penetrate gas and withstand long periods of high heat. (OFHC metal oxygen free copper gasket: 400oC under; Viton gasket: 180oC under). Widely used in high vacuum and ultra high vacuum fields.


Linde Polymer Tec Co., Ltd - www.lindeseals.com
- No. 12, Jinling Road, Changtai District, Zhangzhou, Fujian Province, China

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products: Semiconductor Vacuum System Seals

O-Rings Seals, Infinite Size O-Ring, Rubber Washers, Rubber Gaskets, V-Ring Seals, Oil Seals


Moken Xiamen industrial Co., Ltd - www.mokensealing.com
- No. 2, Jixiang West Road, Tong'an District, Xiamen City, Fujian Province, China

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products: Fluorosilicone and Perfluoroether (FFKM) O-Rings

  • Excellent Chemical Resistance: It can resist the erosion of highly corrosive chemical reagents such as hydrofluoric acid and nitric acid, ensuring that the sealing parts will not fail due to corrosion during semiconductor etching, cleaning and other processes.
  • Good High-temperature Resistance: It can be used continuously in the temperature range from -60°C to 200°C. Some models can withstand transient high temperatures, making it suitable for high-temperature processes such as etching and coating.
  • High Vacuum Performance: With a low outgassing rate, it meets the requirements of the high vacuum environment in the semiconductor industry, prevents gas leakage, and maintains the process vacuum degree.


Sonkit Industry - www.sonkitsealing.com
- Building D, NO.123, Xinjin Rd, Qingpu District, Shanghai 201712, China

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products: UHV metal ring seals

    Sonkit metal ring seals find application in various pieces of semiconductor equipment, including:
  • Vacuum Processing Equipment: These seals maintain the necessary vacuum levels in equipment used for deposition, etching, implantation, and other key processes.
  • Wafer Handling Equipment: Sonkit seals prevent contamination in equipment used for handling and processing wafers, such as wafer carriers and cassettes.
  • Gas Delivery Systems: These seals ensure the integrity of gas lines, valves, and ports, preventing leaks and maintaining the purity of gases used in semiconductor manufacturing.
  • Light Sources & Vacuum Chambers: Sonkit seals are critical in maintaining the extreme vacuum requirements of light sources and vacuum chambers used in research and semiconductor manufacturing.


XHH Seals - www.xhh-seals.com
- Building D, NO.123, Xinjin Rd, Qingpu District, Shanghai 201712, China

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XHH Seals is a leading manufacturer of PTFE spring-energized seals, hydraulic seals, and high-purity FFKM seals. ISO 9001 certified and exporting to 60+ countries worldwide. 		products: High-Purity FFKM O-Rings for Vacuum & Corrosive Semiconductor Processes

Semiconductor FFKM O rings engineered for harsh chemistries, elevated temperatures, and vacuum service (compound dependent).
XHH Seals supplies high-purity perfluoroelastomer O-rings for gate/slit valves, transfer chambers, load locks, and critical sealing interfaces.

 

 

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