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ANLET roots vacuum pump ANLET Co., Ltd - www.anlet.co.jp
- 1-25 Takara, Kanie-cho, Ama-gun, Aichi 497-8531, Japan

email, Tel +81 0567-95-1211 		products: Roots type vacuum pumps


KOMIYAMA Electron vacuum equipment for FPD and semiconductor manufacturing KOMIYAMA Electron Co., Ltd - www.komiyamae.co.jp
- 2278 Narusawa-mura, Minamituru-gun, Yamanashi, 401-0320, Japan

email, Tel. (+81)555-85-2844
products: vacuum equipment for FPD and semiconductor manufacturing

We have established high level technology necessary for design, parts machining, assembling, adjustment and installation of vacuum equipment.


Takasago Fluidic Systems Takasago Electric, Inc. - www.takasago-fluidics.com
- 66 Kakitsubata, Narumi-cho, Midori-ku, Nagoya, Aichi 458-8522, Japan

email, Tel. +81 52 891 2301

Takasago Electric, Inc. is a specialist manufacturer of miniature chemically inert valves and pumps. 		products: Micro Pumps, Piezoelectric Micro Pumps

We have a lineup of piezoelectric micro pumps, pen-type syringe pumps, miniature peristaltic pumps, solenoid metering pumps, etc, which are very small and lightweight.
These are suitable for micro fluidic delivery. Our pumps contribute to miniaturization of customers equipment and they can be used in various sorts of applications.


TOYOTA Industries Corporation - www.toyota-industries.com
- 2-1 Toyoda-cho, Kariya-shi, Aichi 448-8671, Japan

email, Tel. +81-566-27-5699 		products:
  • T100L (100m3/h down to 0,01 Torr) is an ultra compact and quiet roots dry pump for clean application. It is designed for the integration into semiconductor equipment in the cleanroom.
  • T100P (100m3/h down to 0,01 Torr) is excellent performance dry pump for all process including light duty and harsh duty processes. It has good reliability and safety for reactive gases and deposition.
  • T1000 (600-950m3/h down to 0,001 Torr) is designed to cover wide range of processes with its high capacity and variable pumping speed. It has good reliability and safety for reactive gases and deposition.

 

 

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