|
Ebara Technologies - www.
151 Main Avenue, Sacramento, CA 95838, USA
email, Tel. Fax
|
|
Products:
Dry vacuum pumps
EBARA is a world leader in the design and manufacture of "dry" mechanical pumps. EBARA dry pumps provide a host of product enhancements including increased reliability, reduced clean room particulate load, low noise, low vibration, lower operating costs, and the lowest cost of ownership. EBARA's dry pumps survive the harshest applications such as LPCVD, PECVD, CVD, and metal etch. EBARA's dry pumps are used for many applications in and outside the semiconductor industry where oil backstreaming is unacceptable.
EBARA has manufacturing facilities in Sacramento, Ca and Fujisawa, Japan.
|
|
Graham Corporation (Headquarters) - www.
20 Florence Avenue, Batavia NY 14020, USA
email, Tel. Fax
|
|
Products:
Dry vacuum pumps
The Graham DRYFLO vacuum pump is a two-stage hook & claw design with two claws per stage. Graham DRYFLO dry vacuum pumps run without working fluids such as steam or water. As a result, they run clean, eliminating environmental worries and the cost of contaminant disposing, they reduce emissions, and ease solvent recovery.
|
|
KASHIYAMA USA, Inc. - www.
3350 Scott Boulevard #6101, Santa Clara, CA 95054, USA
email, Tel. Fax
company profile:
Vacuum Pump Sales, Customer Support, Service.
|
|
Products:
Dry vacuum pumps
|
|
KINNEY Vacuum - www.
Michele Mannering, 495 Turnpike Street Canton, MA 02021, USA
email, Tel. Fax
|
|
Products:
Dry vacuum pumps
KDP Fixed Pitch Dry Screw Vacuum Pumps KDP-150, KDP-330, KDP-400, KDP-800
SDV Variable Pitch Dry Screw Vacuum Pump SDV-120,SDV-200, SDV-320, SDV-430, SDV-800, SDV-1500, SDV-2700
|
|
nash_elmo Industries - www.
9 Trefoil Drive, Trumbull, CT 06611-1330, USA
email, Tel. Fax
|
|
Products:
Dry vacuum pumps
D_100 Series, One-stage claw: for industrial vacuum needs with vacuums up to 24" Hg vacuum (150 torr) and pressures of 30 PSI (2 Bar).
D_200 Series, Rotary Screw: for corrosives, organics, inorganics, and solvents
D_300 Series, Three-stage claw
D_400 Series, Rotary Lobe, also offered in a variety of special materials to handle condensible vapors.
|
|
TOYOTA Industries Corporation -
- 44901 Industrial Drive, Fremont, CA 94538, USA
email, Tel. Fax
company profile:
Toyota Industries Corporation manufactures and sells high quality and reliable dry vacuum pumps using the technology cultivated in the development and production of car air-conditioning compressors.
|
|
Products:
Dry vacuum pumps
EC 100L and T Series use a multistage roots system.
These dry pumps mainly used in semiconductor production equipment, have achieved best-in-class low power consumption and contributed to the reduction of electricity consumption and CO2 emissions.
- T100L (100m3/h down to 0,01 Torr) is an ultra compact and quiet roots dry pump for clean application. It is designed for the integration into semiconductor equipment in the cleanroom.
- T100P (100m3/h down to 0,01 Torr) is excellent performance dry pump for all process including light duty and harsh duty processes. It has good reliability and safety for reactive gases and deposition.
- T1000 (600-950m3/h down to 0,001 Torr) is designed to cover wide range of processes with its high capacity and variable pumping speed. It has good reliability and safety for reactive gases and deposition.
|
Keywords
www.vacuum-guide.com
|