Thin Film thickness monitoring

    Vacuum coating systems (Equipment)     Vacuum coating (Services)         Sputtering sources     Sputtering targets    

Thin Film thickness monitoring        Thin Film Deposition Controllers

    America     Asia Pacific     EUROPE         DE     UK    




ONLINK ONLINK Technologies GmbH - www.onlink.de
- Porschestr. 12, 63512 Hainburg, Germany

Klaus Schafsteck, email: info(at)onlink.de, Tel. +49 (0)6182-935116

ONLINK is specialised in providing Components, Service and entire Coating Systems to the Vacuum Industry.
products:   Optical Monitoring and Quartz Crystal Monitoring

Measuring Instruments
Optical Monitor OMD-8000
In-situ, real time Photometer for precision optics
Optical Monitoring measures the true optical thickness rather than the deposited mass used with quartz crystal monitoring. Therefore complex or precision coatings always require a combination of both measuring methods - Optical Monitoring and Quartz Crystal Monitoring. The OMD-8000 with its various accessories provides both methods in one unit to add precision and accuracy to your coating process.




    Keywords     www.vacuum-guide.com








From Wikipedia - Thin-film thickness monitors
Thin-film thickness monitors, deposition rate controllers, are a family of instruments used in high and ultra-high vacuum systems. They can measure the thickness of a thin film, not only after it has been made, but while it is still being deposited, and some can control either the final thickness of the film, the rate at which it is deposited, or both. Not surprisingly, the devices which control some aspect of the process tend to be called controllers, and those that simply monitor the process tend to be called monitors.
Most such instruments use a quartz crystal microbalance as the sensor. Optical measurements are sometimes used; this may be especially appropriate if the film being deposited is part of a thin film optical device.
A thickness monitor measures how much material deposited on its sensor. Most deposition processes are at least somewhat directional. The sensor and the sample generally cannot be in the same direction from the deposition source (if they were, the one closer to the source would shadow the other), and may not even be at the same distance from it. Therefore, the rate at which the material is deposited on the sensor may not equal the rate at which it is deposited on the sample. The ratio of the two rates is sometimes called the "tooling factor". For careful work, the tooling factor should be checked by measuring the amount of material deposited on some samples after the fact and comparing it to what the thickness monitor measured. Fizeau interferometers are often used to do this. Many other techniques might be used, depending on the thickness and characteristics of the thin film, including surface profilers, ellipsometry, and scanning electron microscopy of cross-sections of the sample. Many thickness monitors and controllers allow tooling factors to be entered into the device before deposition begins.